Coating of overstoichiometric transition metal nitrides (TMNx (x > 1)) by magnetron sputtering-Reference-Cited by-同舟云学术

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Coating of overstoichiometric transition metal nitrides (TMNx (x > 1)) by magnetron sputtering

Published:2018-12-13 Issue:SA Volume:58 Page:SAAD10
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Musil Jindřich^ORCID,Kos Šimon^ORCID,Jaroš Martin,Čerstvý Radomír^ORCID,Haviar Stanislav^ORCID,Zenkin Sergei^ORCID,Čiperová Zuzana

Funder

Grantová Agentura Ceské Republiky

. the project LO 1506 of the Czech Ministry of Education, Youth and Sports

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/58/i=SA/a=SAAD10/pdf

Reference48 articles.

1. (TiAlV)N1−x thin films deposited by reactive sputtering: chemical composition

2. Structure-hardness relations in sputtered Ti–Al–V–N films

3. A concept for the design of novel superhard coatings

4. Hard and superhard nanocomposite coatings

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2. THE INFLUENCE OF PLASMA ASSISTANCE MODES ON CHARACTERISTICS AND COMPOSITION OF PVD ZIRCONIUM NITRIDE COATINGS;High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes;2023

3. Magnetron Sputtering of Transition Metal Nitride Thin Films for Environmental Remediation;Coatings;2022-11-14

4. Magnetron deposition of chromium nitride coatings using a hot chromium target: Influence of magnetron power on the deposition rate and elemental composition;Surface and Coatings Technology;2022-03

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