Theoretical potential of extremely high quality factors of β-Ga2O3 based MEMS resonators
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Published:2020-01-01
Issue:1
Volume:59
Page:011002
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Chen Yen-Ju,Chung Chang-Jung,Li Jian V.
Funder
Ministry of Science and Technology, Taiwan
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering