Removing process of the three-dimension periodic nanostructure fabricated from KMPR photoresist-Reference-Cited by-同舟云学术

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Removing process of the three-dimension periodic nanostructure fabricated from KMPR photoresist

Published:2019-05-16 Issue:SD Volume:58 Page:SDDF08
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Wang Xudongfang,Ishikawa Yasuaki,Araki Shinji,Uenuma Mutsunori,Uraoka Yukiharu

Funder

Thermal and Electric Energy Technology Foundation

Japan Society for the Promotion of Science

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

https://iopscience.iop.org/article/10.7567/1347-4065/ab0dea/pdf

Reference31 articles.

1. Anomalous thermoelectricity of pure ZnO from 3D continuous ultrathin nanoshell structures

2. Monolithic Bi1.5Sb0.5Te3 ternary alloys with a periodic 3D nanostructure for enhancing thermoelectric performance

3. 3D conducting nanostructures fabricated using direct laser writing

4. Thermally Stable Organic–Inorganic Hybrid Photoresists for Fabrication of Photonic Band Gap Structures with Direct Laser Writing

5. Chalcogenide glass-based three-dimensional photonic crystals

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1. Advances in Pretreatments for Electroless Copper Plating on Polymer Materials;Acta Chimica Sinica;2022

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