Study on Quartz Multitier Mold Fabrication Using Gray Scale Laser Beam Lithography
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference24 articles.
1. Implementation of an imprint damascene process for interconnect fabrication
2. Microstructuring of Dual Damascene Opening by Hot Embossing Combined with Etch-Back Process
3. Microstructuring of 45-µm-Deep Dual Damascene Openings in SU-8/Si by UV-Assisted Thermal Imprinting with Opaque Mold
4. High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing
5. Machining characteristics of complex prism pattern on electroplated roll by copper
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