Comparison of Process Options for Improving Backend-of-Line Reliability in 28 nm Node Technologies and Beyond
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Published:2011-05-01
Issue:5S1
Volume:50
Page:05EA01
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Aubel Oliver,Hennesthal Christian,Hauschildt Meike,Poppe Jens,Hahn Jens,Boemmels Juergen,Nopper Markus,Seidel Robert
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering