Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication-Reference-Cited by-同舟云学术

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Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication

Published:2011-04-01 Issue:4S Volume:50 Page:04DG15
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Mochizuki Masaya,Kitabayashi Yuta,Nakajima Tomoya,Satoi Daiki,Ishikawa Fumitaro,Kondow Masahiko,Hara Makoto,Kimura Chiharu,Aoki Hidemitsu,Sugino Takashi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference19 articles.

1. Deeply etched two-dimensional photonic crystals fabricated on GaAs/AlGaAs slab waveguides by using chemically assisted ion beam etching

2. Precise control of dry etching for nanometer scale air-hole arrays in two-dimensional GaAs/AlGaAs photonic crystal slabs

3. Studies on key nano-fabrication processes for GaAs-based air-bridge-type two-dimensional photonic-crystal slab waveguides

4. Inductively coupled plasma etching of GaAs suspended photonic crystal cavities

5. Novel Design of Current Driven Photonic Crystal Laser Diode

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