Effects of CF4Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2Layer Grown by Atomic Layer Deposition-Reference-Cited by-同舟云学术

Effects of CF4Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2Layer Grown by Atomic Layer Deposition

Published:2011-04-01 Issue:4S Volume:50 Page:04DL06
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Chin Chi-Hang,Lu Tseng-Fu,Wang Jer-Chyi,Yang Jung-Hsiang,Lue Cheng-En,Yang Chia-Ming,Li Sheng-Shian,Lai Chao-Sung

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference19 articles.

1. Analytical features of K+-sensitive membrane obtained by implantation in silicon dioxide films

2. Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements

3. Development and Electrochemical Investigations of an EIS- (Electrolyte-Insulator-Semiconductor) based Biosensor for Cyanide Detection

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