Scrub Cleaning with PVA Brushes-Reference-Cited by-同舟云学术

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Scrub Cleaning with PVA Brushes

Published:2018-06-15 Issue:2 Volume:32 Page:223-230
ISSN:0914-2843
Container-title:JAPANESE JOURNAL OF MULTIPHASE FLOW
language:en
Short-container-title:JAPANESE JOURNAL OF MULTIPHASE FLOW

Author:

SANADA Toshiyuki,FUKUNAGA Akira,HIYAMA Hirokuni

Publisher

The Japanese Society for Multiphase Flow

Subject

General Medicine

Link

https://www.jstage.jst.go.jp/article/jjmf/32/2/32_2018.T003/_pdf

Reference15 articles.

1. [1] Hattori, T., Use of Multiphase Flows in Leading- Edge Semiconductor-Surface Cleaning, Japanese Journal of Multiphase Flow, Vol. 24(1), 13-20 (2010).

2. [2] Yamada, M. and Matsuzaki, K., Vinylon Sponge (in Japanese), High Polymers, Vol. 10, 227-231 (1961).

3. [3] Hansen, W. R. and Autumn, K., Evidence for Self-Cleaning in Gecko Setae, Proc. Natl. Acad. Sci. U. S. A., Vol. 102(2), 385-389 (2005).

4. [4] Hu, S., Lopez, S., Niewiarowski, P. H. and Xia, Z., Dynamic Self-Cleaning in Gecko Setae via Digital Hyperextension, J. Royal Society Interface, Vol. 9(76), 2781-2790 (2012).

5. [5] Gillies, A. G., Puthoff, J., Cohen, M. J., Autumn, K. and Fearing, R. S., Dry Self-Cleaning Properties of Hard and Soft Fibrillar Structures, ACS Applied Materials & Interfaces, Vol. 5(13), 6081-6088 (2013).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Physical Wet Cleaning Technology for Semiconductor Devices;JAPANESE JOURNAL OF MULTIPHASE FLOW;2023-06-15

2. Wafer Cleaning with PVA Roller Brushes;JAPANESE JOURNAL OF MULTIPHASE FLOW;2023-06-15

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