Microstructure and Surface Topography Evolution of Ti and Ni Thin Structures

Author:

Allameh S. M.,Soboyejo W. O.

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference55 articles.

1. Aspar, B., Cartier, A., Moriceau, H., Rayssac, O. and Cartier, A.M. 2000. “Multilayer structure with controlled internal stresses used. e.g., in microelectronic circuits as substrate or stiffener layer includes first and second stress-adapting layers having contact stresses with first and second main layers”. Vol. (WO-200048238 A1),

2. Thermomechanical Behavior of Multilayer Structures in Microelectronics

3. Carpenter, J.A.J. 1991. Measurements of properties of materials in multilayer ceramic capacitors and microelectronic packaging. Presented in Symposium on Metal-Ceramic Joining presented at the TMS Fall Meeting. 1991, Warrendale, PA. pp.205–217. Publ by Minerals, Metals and Materials Soc (TMS).

4. Buchwalter, L.P., Callegari, A.C., Cohen, S.A., Graham, T.O., Hummel, J.P., Jahnes, C.V., Purushothaman, S., Saenger, K.L. and Shaw, J.M. 2001. “Fabrication of multilayer microelectronic interconnect structure used in high density interconnects for high performance microelectronic device chips uses a low dielectric constant material, e.g., air as the intralevel dielectric”. Vol. (US-6184121 B1),

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