Thickness–stress relations in aluminum thin films
Author:
Affiliation:
1. a Instituto de Ciencia de Materiales , CSIC Campus Cantoblanco, Madrid , 28049 , Spain
2. b Department of Applied Physics , CINVESTAV-IPN , Unidad Merida, A.P. 73-Cordemex, Merida , Yucatan , 97310 , Mexico
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1081/AMP-120002797
Reference28 articles.
1. Electromigration—A brief survey and some recent results
2. Electromigration Damage in Aluminum Film Conductors
3. Activation energy for electrotransport in thin aluminum films by resistance measurements
4. Investigation on surface morphology of sputtered YBa2Cu3Ox thin and ultrathin films
5. The effects of substrate surface steps on the microstructure of epitaxial Ba2YCu3O7−x thin films on (001) LaAlO3
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Optical and Electrical Properties of the films of ALTiO2 prepared by Magnetron Sputtering;Journal of Physics: Conference Series;2021-09-01
2. Influence of thickness on crystallographic, stereometric, optoelectronic, and electrochemical characteristics of electron-beam deposited indium tin oxide thin films;Materials Chemistry and Physics;2021-02
3. Dependence of thickness, morphology, and crystallographic properties of Mo and ZrN coatings on U-Mo substrate size;Journal of Nuclear Materials;2018-12
4. Properties of physically deposited thin aluminium film coatings: A review;Journal of Alloys and Compounds;2018-05
5. Effect of annealing process on dielectric and multiferroic properties of Sol-Gel derived bismuth chromate thin films;Ferroelectrics Letters Section;2017-05-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3