ADSORPTION OF TETRAFLUOROMETHANE AND NITROGEN BY VARIOUS ADSORBENTS
Author:
Publisher
Informa UK Limited
Subject
Filtration and Separation,Process Chemistry and Technology,General Chemical Engineering,General Chemistry
Link
http://www.tandfonline.com/doi/pdf/10.1081/SS-120005465
Reference12 articles.
1. C[sub 2]F[sub 6]/O[sub 2] and C[sub 3]F[sub 8]/O[sub 2] Plasmas SiO[sub 2] Etch Rates, Impedance Analysis, and Discharge Emissions
2. Innovative Surface Wave Plasma Reactor Technique for PFC Abatement
3. A Carbon Arc Process for Treatment of CF4 Emissions
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