Wafer‐level vacuum‐encapsulated silicon resonators with arc‐welded electrodes
Author:
Affiliation:
1. Department of Electrical and Computer EngineeringMcGill UniversityMontrealQuebecH3A0E9Canada
2. Department of Electrical and Computer EngineeringKettering LaboratoriesUniversity of DaytonDaytonOH45469USA
Funder
CMC Microsystems
University of Dayton
Natural Sciences and Engineering Research Council of Canada
Publisher
Institution of Engineering and Technology (IET)
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/mnl.2017.0270
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4. KhineL.PalaniapanM.LichunS.et al.: ‘Characterization of SOI Lame‐mode square resonators’.Int. Frequency Control Symp. Honolulu USA May2008 pp.625–628
5. A simple model of feedback oscillator noise spectrum
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