Developing integrated piezoelectric direct current sensor with actuating and sensing elements

Author:

Wang Dong F.12,Suzuki Yasuhiro1,Kobayashi Takeshi2,Itoh Toshihiro2,Maeda Ryutaro2

Affiliation:

1. Micro Engineering and Micro Systems LaboratoryDepartment of Mechanical EngineeringFaculty of EngineeringIbaraki UniversityHitachiIbaraki316‐8511Japan

2. Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME)National Institute of Advanced Industrial Science and Technology (AIST)TsukubaIbaraki305‐8564Japan

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Reference13 articles.

1. Ministry of the Environment Government of Japan available at:http://www.env.go.jp 2010

2. Current sensor using magnetic materials;Ripka P.;J. Optoelectron. Adv. Mater.,2004

3. Planar fluxgate current sensor integrated in printed circuit board

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