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Electrostatically driven and capacitively detected differential lateral resonant pressure microsensor

  • Published:2013-10 Issue:10 Volume:8 Page:650-653
  • ISSN:1750-0443
  • Container-title:Micro & Nano Letters
  • language:en
  • Short-container-title:Micro & Nano Letters

Author:

Jiao Hailong12,Xie Bo12,Wang Junbo1,Chen Deyong1,Chen Jian1

Affiliation:

1. State Key Laboratory of Transducer TechnologyInstitute of ElectronicsChinese Academy of SciencesBeijing100190People's Republic of China

2. College of Electrical and Communication EngineeringUniversity of Chinese Academy of SciencesBeijing100080People's Republic of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

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4. A Resonant High Pressure Sensor Based on Dual Cavities Design;2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2021-04-25

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