Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Reference8 articles.
1. Ruffell, J.P., Douglas-Hamilton, D.H., Kaim, R.E., and Izumi, K.: ‘A high current high voltage oxygen ion implanter’, Abstracts of the Sixth International on Ion Implantation Technology, 1986), p. C-3
2. Oxygen Precipitation Along Individual Ion Tracks During High Dose O+ Implantation into Silicon
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1 articles.
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