GaAs/GaAs double heterostructure laser monolithically integrated with passive waveguide using focused ion beam etching

Author:

Remiens D.,Menigaux L.,Ben Assayag G.,Gierak J.,Sudraud P.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Reference6 articles.

1. Menigaux, L., Carenco, A., and Sansonetti, P.: (French Patent no.8405053)

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Optimization of experimental operating parameters for very high resolution focused ion beam applications;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11

2. High‐resolution focused ion beams;Review of Scientific Instruments;1993-05

3. Micromachining processes and structures in micro-optics and optoelectronics;Journal of Micromechanics and Microengineering;1991-12-01

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