Thermal CVD of homoepitaxial diamond using CF4 and F2
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19890818?crawler=true&mimetype=application/pdf
Reference6 articles.
1. Reimer, L.: Scanning electron microscopy, (Springer-Verleg, Berlin 1985)
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