Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Cited by
4 articles.
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1. Device applications of ion beams;Radiation Effects;1980-01
2. Literatur;Ionenimplantation;1978
3. Implantation damage in silicon devices;Journal of Physics D: Applied Physics;1977-03-11
4. Ion Implantation;Semiconducting Devices;1976