Micro-machined resonant out-of-plane accelerometer with a differential structure fabricated by silicon-on-insulator

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Micro-machined resonant out-of-plane accelerometer with a differential structure fabricated by silicon-on-insulator–MEMS technology

Published:2012-12-01 Issue:12 Volume:7 Page:1230-1233
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:

Author:

Wang Junbo,Shang Yanlong,Sun Zhenguo,Chen Jian,Chen Deyong

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://digital-library.theiet.org/content/journals/10.1049/mnl.2012.0536?crawler=true&mimetype=application/pdf

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1. A Review on MEMS Silicon Resonant Accelerometers;Journal of Microelectromechanical Systems;2024-04

2. A New High-Sensitivity Differential Z-Axis FM Accelerometer;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15

3. Silicon MEMS inertial sensors evolution over a quarter century;Journal of Micromechanics and Microengineering;2021-07-14

4. Resonant Sensing Element Realized as a Single Crystal Si Cantilever Actuated by Fringing Electrostatic Fields;IEEE Sensors Journal;2021-05-01

5. An improved structural design for accelerometers based on slotted eight-beam structure;Sensor Review;2018-01-15

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