Author:
Villarroya M.,Figueras E.,Verd J.,Teva J.,Abadal G.,Pérez-Murano F.,Montserrat J.,Uranga A.,Esteve J.,Barniol N.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Reference9 articles.
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2. An integrated CMOS micromechanical resonator high-Q oscillator
3. Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications
4. SOI CMOS gas sensors
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