Influence of surface roughness on the adhesion hysteresis of nano thin film

Author:

Lin Qijing1234,Zhang Fuzheng2,Han Feng12,Zhao Man2,Jiang Zhuangde2

Affiliation:

1. Collaborative Innovation Center of High‐End Manufacturing EquipmentXi'an Jiaotong UniversityXi'an710054People's Republic of China

2. State Key Laboratory for Manufacturing Systems EngineeringXi'an Jiaotong UniversityXi'an710049People's Republic of China

3. Xi'an Jiaotong University Suzhou InstituteSuzhou215123People's Republic of China

4. State Key Laboratory of Mechanical System and VibrationShanghai Jiaotong UniversityShanghai200240People's Republic of China

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

China Postdoctoral Science Foundation

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Reference24 articles.

1. Stochastic Multiscale Model of MEMS Stiction Accounting for High-Order Statistical Moments of Non-Gaussian Contacting Surfaces

2. A computational stochastic multiscale methodology for MEMS structures involving adhesive contact

3. WalravenJ.A.: ‘Failure mechanisms in MEMS’.IEEE ITC Int. Test Conf. Charlotte NC USA 2003 pp.823–834

4. LiuY.ZhangY.: ‘Adhesion‐induced failure of the slender MEMS structures’.Proc. Int. Conf. on Mechanical Design Manufacture and Automation Engineering (MDMAE) Phuket Thailand 2014 pp.497–501

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