Precise tracking of a piezoelectric positioning stage via a filtering-type sliding-surface control with chattering alleviation

Author:

Shieh H.-J.,Huang P.-K.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering,Control and Optimization,Computer Science Applications,Human-Computer Interaction,Control and Systems Engineering

Reference32 articles.

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3. Fillard, J.P.: ‘Near field optics and nanoscopy’, (World Scientific Publishing, New Jersey 1996)

4. Control orientated synthesis of high-performance piezoelectric shunt impedances for structural vibration control

5. Gardner, J.W., Varadam, V.K., and Awadelkarim, O.O.: ‘Microsensor, MEMS, and smart devices’, (John Wiley, New York 2001)

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