1. Madou, M.J.: ‘Fundamentals of microfabrication’, (CRC Press, Boca Raton, FL 1997)
2. Elwenspoek, M., and Jansen, H.: ‘Silicon micromachining’, (Cambridge University Press, Cambridge, UK 1999)
3. Microactuators and micromachines
4. Micromachining for optical and optoelectronic systems