Dependence of radiation induced damage on gate oxide thickness in MOS capacitors with ultrathin gate oxides

Author:

Joshi A.B.,Kwong D.L.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Reference10 articles.

1. Ma, T.P., and Dressendorfer, P.V.: Ionizing radiation effects in MOS devices and circuits, (Wiley Interscience, New York 1989)

2. Sze, S.M.: Physics of semiconductor devices, 2nd edn(Wiley, New York 1981)

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1. Radiation Induced Change in Defect Density in ${\hbox {HfO}}_{2}$-Based MIM Capacitors;IEEE Transactions on Nuclear Science;2009-10

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3. Reliability of Thin Gate Oxides Irradiated under X-Ray Lithography Conditions;Japanese Journal of Applied Physics;2001-04-30

4. Electron-beam irradiation-induced gate oxide degradation;Journal of Applied Physics;2000-12

5. Does short wavelength lithography process degrade the integrity of thin gate oxide?;Microelectronics Reliability;2000-08

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