Three‐state quantum dot gate field‐effect transistor in silicon‐on‐insulator
Author:
Affiliation:
1. Intel CorporationHillsboroOR97124USA
2. Global FoundriesMaltaNY12020USA
3. University of HartfordWest HartfordCT06117USA
4. University of ConnecticutStorrsCT06269USA
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/iet-cds.2014.0202
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5. Wilk G.D. Green M.L. Ho M.‐Y. et al.: ‘Improved film growth and flatband voltage control of ALD HfO2 and Hf‐Al‐O with n+ poly‐Si gates using chemical oxides and optimized post‐annealing’.Symp. VLI Technology Digest of Technical Papers 2002 pp.88–99
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