Effect of PZT annealing on structural changes in PZT/SiO2 surface and its masking behaviour to KOH/TMAH-Reference-Cited by-同舟云学术

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Effect of PZT annealing on structural changes in PZT/SiO2 surface and its masking behaviour to KOH/TMAH

Published:2011 Issue:11 Volume:6 Page:892
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:Micro Nano Lett.

Author:

Joshi A.B.,Bodas D.,Gandhi R.,Natarajan K.,Gangal S.A.

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://digital-library.theiet.org/content/journals/10.1049/mnl.2011.0513?crawler=true&mimetype=application/pdf

Reference19 articles.

1. Gad-el-Hak, M.: ‘MEMS hand book’, 2nd(CRC Press, Boca Raton 2006)

2. Surface micromachined piezoelectric accelerometers (PiXLs)

3. Available at: www.radiotron.com

4. Simulation and design of piezoelectric microcantilever chemical sensors

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