Thermodynamic processes on a semiconductor surface during in‐situ multi‐beam laser interference patterning
Author:
Affiliation:
1. Department of Electronic and Electrical Engineering University of Sheffield Sheffield S3 7HQ UK
2. College of Information Science and Electronic Engineering Zhejiang University Hangzhou 310007 People's Republic of China
Funder
Engineering and Physical Sciences Research Council
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/iet-opt.2018.5028
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