1. Silicon as a mechanical material
2. Muller, R.S., Howe, R.T., Senturia, S.D., Smith, R.L., and White, R.M.: ‘Microsensor’, (IEEE Press, New York, 1991)
3. Yamasaki, H.: ‘Handbook of sensors and actuators – intelligent sensors’, (Elsevier, 1996)3,
4. Ristic, L.: ‘Sensor technology and devices’, (Artech House 1994)
5. Maluf, N.: ‘An introduction to microelectromechanical systems engineering’, (Artech House 2000)