Simultaneous Prediction for Multiple Key Performance Indicators in Semiconductor Wafer Fabrication-Reference-Cited by-同舟云学术

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Simultaneous Prediction for Multiple Key Performance Indicators in Semiconductor Wafer Fabrication

Published:2016-11 Issue:6 Volume:25 Page:1159-1165
ISSN:1022-4653
Container-title:Chinese Journal of Electronics
language:en
Short-container-title:Chin. j. electron.

Author:

Cao Zhengcai¹²,Liu Xuelian¹²,Hao Jinghua³,Liu Min³

Affiliation:

1. College of Information Science and TechnologyBeijing University of Chemical TechnologyBeijing100029China

2. Key Laboratory of Symbolic Computation and Knowledge Engineering of Ministry of EducationJilin UniversityChangchun130012China

3. Department of AutomationTsinghua UniversityBeijing100084China

Funder

National Natural Science Foundation of China

Beijing Municipal Natural Science Foundation

Publisher

Institution of Engineering and Technology (IET)

Subject

Applied Mathematics,Electrical and Electronic Engineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/cje.2016.11.001

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