Three‐hot‐wire acoustic particle velocity sensor with improved detection capability

Author:

Li Zhe1,Chang Wenhan1,Gao Chengchen1,Hao Yilong1

Affiliation:

1. National Key Laboratory of Nano/Micro Fabrication TechnologyInstitute of Microelectronics, Peking UniversityBeijingPeople's Republic of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Reference4 articles.

1. An overview of microflown technologies;Bree H.‐E.;Acta Acust. United With Acust.,2003

2. Analytic model of a two‐wire thermal sensor for flow and sound measurements;Honschoten J.W.;J. Micromech. Microeng.,2004

3. A novel five‐wire micro anemometer with 3D directionality for low speed air flow detection and acoustic particle velocity detecting capability;Li Z.;J. Micromech. Microeng,2018

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5. An L-Shaped 2-Dimensional Particle Velocity Sensor;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20

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