A novel study of the resistance of thermopile for thermoelectric MEMS microwave power sensors
Author:
Affiliation:
1. College of Electronic and Optical Engineering Nanjing University of Posts and Telecommunications Nanjing China
Funder
National Natural Science Foundation of China
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/ell2.12358
Reference8 articles.
1. Characteristics of Doped n+ GaAs Thermopile-Based RF MEMS Power Sensors for MMIC Applications
2. Thermoelectric AC power sensor by CMOS technology
3. Huang C.C. Huang Q.A.&Liao X.P.: A novel double‐end heating type MEMS microwave power sensor. In: Proceeding 8th International Conference on Solid‐State and Integrated Circuit Technology Shanghai China 23–26 October 2006
4. An Insertion Thermoelectric RF MEMS Power Sensor for GaAs MMIC-Compatible Applications
5. Accuracy improvement of micro‐electro‐mechanical system microwave power sensor based on self‐reference algorithm
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