Total TCAD strategy for DFM in IC technology development-Reference-Cited by-同舟云学术

Total TCAD strategy for DFM in IC technology development

Published:1997-03-01 Issue:2 Volume:144 Page:63-68
ISSN:1350-2344
Container-title:IEE Proceedings - Science, Measurement and Technology
language:en
Short-container-title:

Author:

Walton A.J.,Elliott J.P.,Newsam M.I.,Fallon M.,Sprevak D.,Allan G.A.,Ferguson R.S.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Link

https://digital-library.theiet.org/content/journals/10.1049/ip-smt_19970860?crawler=true&mimetype=application/pdf

Reference21 articles.

1. ‘SUPREM-III – A program for integrated circuit process modelling and simulation’, SEL report, 84-001, Stanford University, July 1984

2. TMA Palo Alto CA‘TSUPREM-4 TMA user manual’, 1994

3. ‘PISCES2 – Poisson and continuity equation solver’, SEL report, Stanford University, Sept. 1984

4. Vladimirescu, A., Newton, A.R., and Pederson, D.O.: ‘SPICE version 2G.0, user's guide’, (University of California Dept EE&CS Berkeley CA 1980 Sept.)

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling and optimization of EBG structure using response surface methodology for antenna applications;AEU - International Journal of Electronics and Communications;2018-05

2. A TCAD system for VLSI implementation of the CVD process using VHDL;Integration;2004-02

3. A TCAD tool for the simulation of the CVD process based on cellular automata;Le Journal de Physique IV;2001-08

4. Automated cost of ownership analysis for process development;SPIE Proceedings;1999-04-23

5. Integration of factory simulation with TCAD process and device simulation within a total TCAD approach to DFM;SPIE Proceedings;1999-04-23