Research on modelling of piezoelectric micro‐positioning stage based on PI hysteresis model-Reference-Cited by-同舟云学术

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Research on modelling of piezoelectric micro‐positioning stage based on PI hysteresis model

Published:2018-12-06 Issue:13 Volume:2019 Page:437-441
ISSN:2051-3305
Container-title:The Journal of Engineering
language:en
Short-container-title:J. eng.

Author:

Shan Li¹,Xiaojing Yang¹,Yao Li¹,Ning Liu¹

Affiliation:

1. Faculty of Mechanical and Electrical EngineeringKunming University of Science and TechnologyKunming 650000People's Republic of China

Funder

National Natural Science Foundation of China

Publisher

Institution of Engineering and Technology (IET)

Subject

General Engineering,Energy Engineering and Power Technology,Software

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/joe.2018.8978

Reference11 articles.

1. Micro electro mechanical systems: technology and applications;Young D.J.;MRS Bull.,2001

2. Trends and frontiers of MEMS;Ge W.;Nanotechnol. Precis. Eng.,2007

3. Research on compound control arithmetic of piezoelectric ceramic based on PI model;Wu Y.;Piezoelectrics Acoustooptics,2015

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