1. School of Instrumentation Science and Opto‐Electronics Engineering, Beijing Information Science and Technology UniversityBeijingPeople's Republic of China
2. Modern Measurement and Control Technology of Ministry of Education Key LaboratoryBeijing Information Science and Technology UniversityNo.12 xiaoying East Road, Qinghe, HaidianBeijingPeople's Republic of China
3. State Key Laboratory of TribologyBeijing Key Lab of Precision/Ultra‐precision Manufacturing Equipments and ControlDepartment of Mechanical EngineeringTsinghua UniversityHaidianBeijingPeople's Republic of China