Robust high bandwidth oscillation‐free digital feedforward compensator for micromachined actuators-Reference-Cited by-同舟云学术

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Robust high bandwidth oscillation‐free digital feedforward compensator for micromachined actuators

Published:2018-12 Issue:12 Volume:13 Page:1703-1707
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:Micro & Nano Letters

Author:

Qi Shengbo¹,Wang Xinning²,Li Chong³⁴,Dean Robert N.⁵

Affiliation:

1. Automation and MeasurementOcean University of ChinaQingdaoShandong266100People's Republic of China

2. Computer Science and Software EngineeringAuburn UniversityAuburnAL36849‐5412USA

3. Electrical EngineeringGeorgia Institute of TechnologyAtlantaGA30332‐0002USA

4. Mechanical EngineeringAuburn UniversityAuburnAL36849‐5412USA

5. Electrical and Computer Engineering DepartmentAuburn University200 Broun HalAuburn36849USA

Funder

National Key Research and Development Program of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/mnl.2018.5413

Reference20 articles.

1. Damping Ratio Analysis of a Silicon Capacitive Micromechanical Accelerometer

2. Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror

3. AwadO.ElSinawiA.H.Bakri‐KassemM.et al.: ‘Feedback control of membrane displacement in RF‐MEMS switches’.2013 IEEE 20th Int. Conf. on Electronics Circuits and Systems (ICECS) 2013 pp.516–519

4. Design, Fabrication, and Measurements of an RF-MEMS-Based Self-Similar Reconfigurable Antenna

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