1. Collaborative Innovation Center of High‐End Manufacturing EquipmentXi'an Jiaotong UniversityXi'an710054People's Republic of China
2. State Key Laboratory for Manufacturing Systems EngineeringXi'an Jiaotong UniversityXi'an710049People's Republic of China
3. State Key Laboratory of Fluid Power and Mechatronic SystemsZhejiang UniversityHanzhou310027People's Republic of China
4. State Key Laboratory of Mechanical System and VibrationShanghai Jiaotong UniversityShanghai200240People's Republic of China