Design and realisation of very high performance 0.2 μm gate GaAs MESFETs

Author:

Vanbremeersch J.,Constant E.,Zimmermann J.,Valin I.,Godts P.,Leroy A.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Reference3 articles.

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Novel electron beam lithography technique for submicron T-gate fabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-03

2. Design, fabrication, and characterization of striped channel HEMT's;IEEE Transactions on Electron Devices;1994

3. Dc Characteristics (I-V) of Pseudomorphic GaAs/InGaAs/AlGaAs Quantum-Wire FETs;MRS Proceedings;1993-01

4. Fabrication of sub-100-nm T gates with SiN passivation layer;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-11

5. Comparison of double and single recessed 0.15μm gate length δ doped AlGaAs/GaAs TEGFETs;Microelectronic Engineering;1991-03

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