Laser-direct-written capacitors and inductors for GaAs monolithic microwave integrated circuit trimming-Reference-Cited by-同舟云学术

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Laser-direct-written capacitors and inductors for GaAs monolithic microwave integrated circuit trimming

Published:1988 Issue:22 Volume:24 Page:1396
ISSN:0013-5194
Container-title:Electronics Letters
language:en
Short-container-title:Electron. Lett.

Author:

Chen C.L.,Black J.G.,Doran S.P.,Mahoney L.J.,Murphy R.A.,Ehrlich D.J.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Link

https://digital-library.theiet.org/content/journals/10.1049/el_19880955?crawler=true&mimetype=application/pdf

Reference4 articles.

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser induced deposition of tungsten and copper;Materials Science and Engineering: B;1997-03

2. Laser processing of tungsten from WF6 and SiH4;Applied Surface Science;1995-02

3. Diode laser induced chemical vapor deposition of WSixon TiN from WF6and SiH4;Journal of Applied Physics;1993-05-15

4. Laser direct writing of tungsten from WF6;Thin Solid Films;1992-10

5. Diode Laser Induced Chemical Vapor Deposition of WSIx from WF6 and SiH4;MRS Proceedings;1991

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