Effect of cooling ambient on electrical activation of dopants in MOVPE of InP
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19880633?crawler=true&mimetype=application/pdf
Reference9 articles.
1. (Canada Patent Appl. 534314)
2. (Europe Patent Appl. 87302815.3)
3. (Japan Patent Appl. 87-92930)
4. (U.S. Patent Appl. 36722)
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