MEMS‐based tunable meander inductor
Author:
Affiliation:
1. Queensland Micro‐and‐Nanotechnology Centre (QMNC)BrisbaneQueensland4111Australia
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/el.2015.2495
Reference16 articles.
1. Integrated tunable magnetic RF inductor;Vroubel M.;Electron. Lett.,2004
2. Microassembled tunable mems inductor
3. New tunable RF MEMS microinductors design
4. Tunable radio frequency MEMS inductors with thermal bimorph actuators;Zine‐El‐Abidine I.;J. Micromech. Microeng.,2005
5. MEMS Switched Tunable Inductors
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