Silica aerogel thick film, an alternative to micromachined air gap for thermal insulation
Author:
Affiliation:
1. The Center for Advanced Computer StudiesUniversity of Louisiana at LafayetteLafayetteLA70504USA
2. Thin Film Sensors LaboratoryDepartment of Electrical and Computer EngineeringUniversity of Louisiana at LafayetteLafayetteLA70504USA
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/el.2015.0088
Reference11 articles.
1. A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate;Roy S.;Solid‐State Electron.,2012
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3. Highly insulating, fully porous silicon substrates for high temperature micro-hotplates
4. Engineering approaches to improvement of conductometric gas sensor parameters. Part 2: Decrease of dissipated (consumable) power and improvement stability and reliability
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