Design of CMOS‐MEMS broadband infrared emitter arrays integrated with metamaterial absorbers based on CMOS back‐end‐of‐line
Author:
Affiliation:
1. Research Center for Advanced Science and TechnologyThe University of TokyoTokyo153‐8904Japan
2. Shanghai Institute of Technical PhysicsChinese Academy of SciencesShanghai200083People's Republic of China
Publisher
Institution of Engineering and Technology (IET)
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/mnl.2016.0275
Reference20 articles.
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2. KonzW.HildenbrandJ.BauersfeldM.et al.: ‘Micromachined IR‐source with excellent blackbody like behaviour’.Proc. of SPIE 5836 Sevilla Spain 1 July2005 pp.540–548
3. Optical gas sensing: a review;Hodgkinson J.;Meas. Sci. Technol.,2012
4. MutinatiG.C.BrunetE.YurchenkoO.et al.: ‘Bimetallic nanoparticles for optimizing CMOS integrated SnO2gas sensor devices’.44th European Solid State Device Research Conf. (ESSDERC) Venice Italy 2014 pp.78–81
5. Wideband perfect light absorber at midwave infrared using multiplexed metal structures
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