Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi‐step deep reactive ion etching process-Reference-Cited by-同舟云学术

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Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi‐step deep reactive ion etching process

Published:2017-07 Issue:7 Volume:12 Page:482-485
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:Micro & Nano Letters

Author:

Wang Wenqiang¹,Li Chen¹,Xu Wencai¹,Zou Helin¹²

Affiliation:

1. Key Laboratory for Micro/Nano Technology and Systems of Liaoning ProvinceDalian University of TechnologyDalian116024People's Republic of China

2. Key Laboratory for Precision and Non‐traditional Machining Technology of Ministry of EducationDalian University of TechnologyDalian116024People's Republic of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/mnl.2016.0805

Reference10 articles.

1. Inkjet Printing for Materials and Devices

2. Ink-jet printing for micropattern generation of laminin for neuronal adhesion

3. Finding the organizational sources of technological breakthroughs: the story of Hewlett-Packard's thermal ink-jet

4. ELECTROMECHANICAL PERFORMANCE OF PIEZOELECTRIC ACTUATORS IN INKJET PRINT HEAD

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal stability of piezoelectricity in polylactide polymers and related piezoelectric minimotor application;IET Nanodielectrics;2022-09

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