Self‐sensing estimator for micromachined electrostatic actuators and parameters’ optimisation-Reference-Cited by-同舟云学术

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Self‐sensing estimator for micromachined electrostatic actuators and parameters’ optimisation

Published:2016-09 Issue:9 Volume:11 Page:528-531
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:Micro & Nano Letters

Author:

Li Chong¹,Dean Robert N.²,Flowers George T.¹

Affiliation:

1. Department of Mechanical EngineeringAuburn UniversityAuburnAL36830USA

2. Department of Electrical and Computer EngineeringAuburn UniversityAuburnAL36830USA

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/mnl.2016.0128

Reference8 articles.

1. Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump

2. Nonlinear circuit analysis technique for microelectromechanical systems with a time‐variant capacitor and an AC power source

3. Electrostatic charge sensor based on a micromachined resonator with dual micro-levers

4. Chipless RFID tag using RF MEMS switch

5. Displacement Measurement With a Self-Sensing MEMS Electrostatic Drive

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Model-based self-sensing algorithm for dielectric elastomer transducers based on an extended Kalman filter;Mechatronics;2018-04

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