Compact thermally actuated latching MEMS switch with large contact force
Author:
Affiliation:
1. Centre for Microsystems TechnologyGhent University/IMECTechnologiepark 914a9052GhentBelgium
Funder
Universiteit Gent
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/el.2014.3234
Reference12 articles.
1. Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration
2. Design and characterization of a thermally actuated latching MEMS switch for telecommunication applications;Dellaert D.;J. Micromech. Microeng.,2014
3. Thermally Actuated Latching RF MEMS Switch and Its Characteristics
4. Microrelays with bidirectional electrothermal electromagnetic actuators and liquid metal wetted contacts;Cao A.;J. Microelectromech. Syst.,2007
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