Performance analysis and characterisation of micro‐nanopositioning systems
Author:
Affiliation:
1. AS2M departmentFemto‐st InstituteBesançonFrance
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1049/el.2014.0926
Reference5 articles.
1. MEMS‐based piezoelectric BAW resonator based on out‐of‐plane degenerate mode for micro angular detector
2. Batch fabricated long throw bi-stable electromagnetic micro-actuator
3. ‘Manipulating industrial robots – performance criteria and related test methods’ ISO 9283 1998
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