Thermal Reflow of Plasma-Polymerized Fluorocarbon for Nanochannels and Particle Encapsulation
Author:
Publisher
Elsevier BV
Subject
General Earth and Planetary Sciences,General Environmental Science
Reference24 articles.
1. Three-dimensional macroporous nanoelectronic networks as minimally invasive brain probes;C Xie;Nature materials,2015
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3. SU-8-based immunoisolative microcontainer with nanoslots defined by nanoimprint lithography;J Kwon;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing,2009
4. Thermal reflow of polymers for innovative and smart 3D structures: A review;R Kirchner;Materials Science in Semiconductor Processing,2019
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