An Improved Method for Measuring Epi-Wafer Thickness Based on the Infrared Interference Principle Addressing Interference Quality and Multiple Interference in Double-Layer Structures

Author:

Song Jinlong,Zhang Haojie,Song Jinlong,Zhai Tianbao,Li Zhisong

Publisher

Elsevier BV

Reference34 articles.

1. Characterization of Si Epitaxial Layer grown on highly-doped Si substrate by using THz reflection spectroscopy;N.-Y Lee;2022 47th International Conference on Infrared, Millimeter and Terahertz Waves,2022

2. Epitaxial silicon carbide on silicon. method of coordinated substitution of atoms (a review);S Kukushkin;Russian Journal of General Chemistry,2022

3. Industrial Perspective of SiC Epitaxy;A A Burk;Wide Bandgap Semiconductors for Power Electronics: Materials, Devices, Applications, 2021. 1: p

4. Giant tunneling electroresistance in epitaxial ferroelectric ultrathin films directly integrated on Si;K Lee;Applied Materials Today,2022

5. Integration of epitaxial La2/3Sr1/3MnO3 thin films on silicon-on-sapphire substrate for MEMS applications;S K Chaluvadi;Applied Surface Science,2022

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3