Capacitive Pressure Sensors Based on Microstructured Polymer-Derived Sicn Ceramics for High-Temperature Applications

Author:

Shao Gang,Ma Chao,Xiong Chunyue,Zhao Rui,wang Kang,Yang Mengmeng,Liang Yi,Li Mingliang,Han Daoyang,Wang Hailong,Zhang Rui

Publisher

Elsevier BV

Reference48 articles.

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2. Highly stable flexible pressure sensors with a quasi-homogeneous composition and interlinked interfaces;Y Zhang;Nat. Commun,2022

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4. Modeling, fabrication, and characterization of SiC concentrically matched differential capacitance output pressure sensors;L Beker;Sens. Actuator A Phys,2018

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