Investigating Dopant Behavior in Crystalline Germanium Via Microwave and High-Pressure Annealing

Author:

Kuo Tai Chen,Lee Wen-Hsi,Current Michael Ira

Publisher

Elsevier BV

Reference27 articles.

1. Germanium-based transistors for future high performance and low power logic applications;Y C Yeo;IEEE International Electron Devices Meeting,2015

2. Graded Crystalline HfO? Gate Dielectric Layer for High-k/Ge MOS Gate Stack;C H Lee;Journal of the Electron Devices Society,2021

3. High mobility high on/off ratio C-V dispersion-free Ge n-MOSFETs and their strain response;Y C Fu;IEEE International Electron Devices Meeting,2010

4. Strain Engineering in Highly Mismatched SiGe/Si Heterostructures;F Isa;Materials Science in Semiconductor Processing,2017

5. First demonstration of Ge nanowire CMOS circuits: Lowest SS of 64 mV/dec, highest gmax of 1057 ?S/?m in Ge nFETs and highest maximum voltage gain of 54 V/V in Ge CMOS inverters;H Wu;IEEE International Electron Devices Meeting,2015

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